SAN JOSE, Calif. — KLA-Tencor Corp. rolled out a new “darkfield” patterned wafer inspection system for 65- and 45-nm applications. The Puma 9000 is based on KLA-Tencor's Streak darkfield imaging ...
In traditional semiconductor packaging, manual defect review after automated optical inspection (AOI) is an arduous task for operators and engineers, involving review of both good and bad die. It is ...
Diverse optical wafer defect inspection systems including (a) Brightfield/darkfield imaging system, (b) Dark-field imaging with null ellipsometry, (c) Through-focus scanning imaging microscopy, (d) ...
MILPITAS, Calif.--(BUSINESS WIRE)--Today KLA-Tencor Corporation (NASDAQ:KLAC), the world’s leading supplier of process control and yield management solutions for the semiconductor and related ...
First darkfield inspection system to use DUV laser scanning for unmatched particle sensitivity Detects particle sizes not seen before by darkfield systems - down to 40nm on patterned wafers ...
SAN JOSE — KLA-Tencor Corp. here said it is offering the industry's first 300-mm wafer inspection tool that provides brightfield, darkfield, and nanotopography defect information in a single scan. The ...
SAN JOSE: KLA-Tencor today introduced the Puma 9150 system, the company's latest advancement in darkfield patterned wafer inspection technology, featuring new optical modes that enable capture of a ...
In addition to surface and subsurface defects, residual stress represents a concern. Over time, these stress points, ...
KLA Corporation is a unique investment opportunity as it holds the No.1 position in semiconductor process control and yield management solutions. Its mission-critical inspection and measurement ...
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