A new technical paper titled “Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS” was published by researchers at KU Leuven, imec, Ghent University, and ...

In addition to surface and subsurface defects, residual stress represents a concern. Over time, these stress points, ...

KLA Instruments™, a division of KLA Corporation, has expanded its defect inspection and metrology portfolio in 2023 to include new systems for semiconductor process development and control, including ...

Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...

Onto has received multiple orders in support of high bandwidth memory (HBM), advanced logic and a variety of specialty segments WILMINGTON, Mass.--(BUSINESS WIRE)--Onto Innovation Inc. (NYSE: ONTO) ...

In summer 2020, KLA Corporation announced the formation of KLA Instruments™, a group that develops, markets and services measurement and defect inspection systems that are used primarily by research ...